Wafer inspection equipment

Name: Wafer inspection equipment
Brand: Komatsu
SKU: KOMATSU-WAFER-INSPECTION-EQUIPMENT

رقم القطعة: KOMATSU-WAFER-INSPECTION-EQUIPMENT

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الوصف

Wafer inspection equipment

Function	Crack detection, stain detection
Process	Surface and internal inspection
Machine size (W x L x H) (mm)	3,600 x 1,200 x 1,900 (Machine size may differ from the description depending on inspection items.)
Machine size (W x L x H) (in)	141.7 x 47.2 x 74.8 (Machine size may differ from the description depending on inspection items.)
Inspection target	Silicon wafers (semiconductors, solar cells)
Max workpiece size (in)	Φ11.8
Max workpiece size (mm)	Φ300
Inspection item	O.D. and corner dimensions, chipping/chipping, cotton stains on front and back, through/non-through cracks, pinholes, foreign matter, plate thickness, waviness/warping, soakmark, resistivity/PN judgment, life time, et cetera. Inspection items not listed can be tailor-made.